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MEMSnet Home: MEMS-Talk: CMOS open layers and cross-sections
CMOS open layers and cross-sections
1999-03-18
John Patrick Bedell
CMOS open layers and cross-sections
John Patrick Bedell
1999-03-18
Hello everybody,
        I am interested in using XeF2 to etch silicon on a CMOS chip, and
would like to know which MOSIS processes support an open layer of exposed
Si substrate for this etching.  More generally, I'd really like to get
detailed cross-sections and layer thicknesses for CMOS processes available
through MOSIS. Does anyone know where this information might be available?
        Thanks!

        Patrick Bedell
        jpb@mrsc.ucsf.edu
        (415) 476 1910


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