I'm  compiling the responses to my request for LPCVD deposition here under:

>From Dave Scherrer:

You can get a custom LPCVD oxide run at ACT MicroDevices.
Contact Greg TenEyck @ 540-639-1986 x 13.


>From  Jeff Melzak

We can probably perform your LTO deposition here at CWRU
Please call me to discuss the details (process, pricing).

        Jeff Melzak
        Manager, CWRU Microfabrication Laboratory (MFL)
        (216)368-3628

>From Karen Markus, MCNC ([email protected]):
we do not have the ability to process 2" wafers. However, if you would like to
run 4" wafers, we would be glad to provide this service through our TechNet
program, which is well documented on our website.

>From [email protected]

Try Chris Ball @ MCNC. He's usually very good in replying.
[email protected]
919-248-1479

From:  [email protected]
Try Cornell CNF www.cnf.cornell.edu, I 've seen people coming from out of
state universities doing their fab here

 Prof.  R. Levy at  NJIT can also do it.  He can be reached at (973) 596-3561

Thanks to all of you.  i hope this information would be of use to some of you.

Shekhar