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MEMSnet Home: MEMS-Talk: SU-8 photoresist
SU-8 photoresist
1999-01-28
Padmaja Ramadas
SU-8 photoresist
Padmaja Ramadas
1999-01-28
SU-8 is virtually insoluble in most chemicals if well crosslinked. You
would have to use RIE to etch off the SU-8.


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