park chang min wrote:
>
> Hello, mems.
> I want to know  etch rate of SiO2 etch rate using etchant Buffered HF (
> 6:1).(BOE)
> And I want to know that the etch rate of SiO2 using etchant KOH(20:80)
> H2O, too.
> Please let me know as soon as possible.
> Sincerely yours.
>
>
Hello,

With BOE the etch rate of SiO2 is about 1
micron/minute.

Kirthi

--
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Kirthi Roberts
School of Engineering Science
Simon Fraser University
Vancouver
Canada
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e-mail : kroberts@sfu.ca
URL: http://www.sfu.ca/~kroberts
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