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MEMSnet Home: MEMS-Talk: Re: LPCVD oxide deposition
Re: LPCVD oxide deposition
1999-03-11
akt1@cornell.edu
1999-03-11
akt1@cornell.edu
1999-03-15
David W. Sherrer
Re: LPCVD oxide deposition
David W. Sherrer
1999-03-15
Dear Shekhar,

You can get a custom LPCVD oxide run at ACT MicroDevices.
Contact Greg TenEyck @ 540-639-1986 x 13.

Regards,

David Sherrer


Shekhar Bhansali wrote:

> We would like to get low stress LPCVD oxide deposited on 4 2-inch
> micromachined wafers.  I'd be happy to pay for the service.
>
> I and my student have already tried to reach MCNC with no luck (We've left
> plenty of voicemails but no one has returned the calls.....yet).
>
> Thanks
> Shekhar Bhansali, Ph.D.
> Center for Microelectronic Sensors and MEMS
> Department of Electrical & Computer Engineering and Computer Science
> University of Cincinnati
> Cincinnati OH 45221-0030
> Phone: (513) 556 0903  Fax: (513) 556 7326



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