Dear,
i'm working on my thesis about solar cells on IMEC (research center in
Leuven, Belgium). But i'm stuck in a specific problem, and i'm looking
for tips and advice to solve the problem.
Problem: i can't bond a silicon wafer to a alumina-substrate(AL2O3
99.9%).
I've done some experiments without any success.
Review of experiments:
A/ high temperature (1000°C), short bonding time (6 hours), the
bonding was surrounded by N2-gas.
surface conditions of the wafer and substrate:
1. both surfaces are dry
2. both surfaces are dry and covered by a nitride layer
3. both surfaces are wet and covered by a nitride layer
4. both surfaces are wet and covered by an undoped pyrox
layer
B/ low temp (200°C) , long time (26 hours), the bonding was
surrounded by N2-gas.
1. both surfaces are wet and covered by a nitride layer
2. both surfaces are wet and covered by a doped pyrox (normally
the pyrox has to become viscose)
Some questions:
+Is there anybody who has some experience with the bonding topics or
somebody who's got usefull information?
+ are there logical explanations why the experiments failed and this on
the base of chemical or physical properties of the materials?
+Do you have some suggestions for other experiments (use of other values
for the parametres (temp, duration, surrounding gas, .......))?
+Can you recommand some people or specific lecture related to the
bonding problem?
All tips and advice are welcome!
Thanx a lot.
Studentical greetings.
Stijn Lenaerts
student 'engineer in micro-electronics', KULeuven Belgium
thesisstudent on IMEC
email:
Stijn.lenaerts@vtk.student.kuleuven.ac.be
address:
steengroevenlaan 5/5/0
3001 Heverlee
Belgium
fax:
+32 16 20.65.29
Is there anybody who has some experience with the bonding topics or
somebody who's got usefull information? All information and tips are
welcome!
Thanx a lot.
Stijn
University KULeuven (belgium)