Hi, Everybody

Right now, a lot of people are practise CO2 drying after the sacrificial
etching.

I wonder whether someone could give me some information about the vendor of
such systems.

Thanks!

Jun


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Jun Zou
Micro Actuator,Sensor & System Group, CCSM

319B Microelectronics Lab
208 N.Wright Street
Urbana, IL 61801
USA
Tel:(217)-265-0808
FAx:(217)-244-6375
E-mail: junzou@uiuc.edu
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