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MEMSnet Home: MEMS-Talk: wet etching of Pt
wet etching of Pt
1999-04-03
Kong Lingbing (Dr)
wet etching of Pt
Kong Lingbing (Dr)
1999-04-03
Dear All,
I am urgently looking for an effect method (preferly wet) to etch electrode
platinum (Pt) on silicon substrate with a thin layer of Ti. Would you please
give me help?
Best regards.

________________________________________________________________
Dr Kong Lingbing
School of EEE
Nanyang Technological University
Block S1, Nanyang Avenue
Singapore 639798

Tel: (65) 7906084
Fax: (65) 7933318
Email: [email protected]
________________________________________________________________


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