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MEMSnet Home: MEMS-Talk: Diffusivity of metals in oxides, nitride and silicon carbide
Diffusivity of metals in oxides, nitride and silicon carbide
1999-04-05
Abdennaceur Karoui
Diffusivity of metals in oxides, nitride and silicon carbide
Abdennaceur Karoui
1999-04-05
              films.

Is there anybody who can provide me with values of the following:

Diffusivity Do (cm2/s) and Q (eV) for  Fe, Cu, Ni, Cr and Zn  in SiO2,
Si3N4, and SiC?
I am mostly interested in values at a temperature of 400 C.

I would greatly appreciate your help if you can recommend a reference or
any info.

Thank you


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