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MEMSnet Home: MEMS-Talk: Sputtered Polysilicon
Sputtered Polysilicon
1999-04-06
Murat Gel
Sputtered Polysilicon
Murat Gel
1999-04-06
Hello,
I am trying to find information about the annealing condition for
preventing stress in sputtered polysilion.
Any contribution will be very appreciated.

Murat Gel
[email protected]

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Murat Gel  [email protected]


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