Can I get advice on the ohmic contact to evaporate Germanium ? The
Germanium is e-beam evaporated at thickness about 0.2 microns. Which metal
can be used for the contact ? Is diffusion barrier required ? Is adhesion
layer needed ? Any concerns or recommendations about electrical behavior and
contact resistance ? Any anneal suggested ? Can anybody suggest some general
references about this ?
Thanks in advance.
Zeng Wenjiang
Research Engineer
Institute of Microelectronics, Singapore.
Fax: (65) 7770670
wenjiang@ime.org.sg