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MEMSnet Home: MEMS-Talk: About SiO2 etching.
About SiO2 etching.
1999-04-06
¹Úâ¹Î
About SiO2 etching.
¹Úâ¹Î
1999-04-06
Hello. Everyone.
I wonder the etch rate of SiO2 using etchant BHF(1:10)
and the etch rate  using etchant KOH(10 wt %, DI).
Someone help me please.
Thanks a lot.
  My E-mail address is

               iampcm@hanmail.net
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