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MEMSnet Home: MEMS-Talk: TMAH resistant wax
TMAH resistant wax
1999-04-07
Shivalik Bakshi
TMAH resistant wax
Shivalik Bakshi
1999-04-07
Dear MEMS Researchers,

Would you know of a wax material that I can use to protect one side of a wafer
while etching the other side in TMAH (or EDP)?

Thanks,
Shivalik

----------------
Shivalik Bakshi,
School of Engineering Science,
Simon Fraser University,
Burnaby, BC V5A 1S6
Canada

Email: [email protected]
Tel: (604) 298-6847


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