try HNO3 and HCl mixture which can etch Pt.

regards

peidong
At 12:51 PM 4/3/99 +0800, you wrote:
>Dear All,
>I am urgently looking for an effect method (preferly wet) to etch electrode
>platinum (Pt) on silicon substrate with a thin layer of Ti. Would you please
>give me help?
>Best regards.
>
>________________________________________________________________
>Dr Kong Lingbing
>School of EEE
>Nanyang Technological University
>Block S1, Nanyang Avenue
>Singapore 639798
>
>Tel: (65) 7906084
>Fax: (65) 7933318
>Email: [email protected]
>________________________________________________________________
>
>
>
Dr Peidong Wang
CoreTek, Inc.
25B Street
Burlington, MA 01803
Tel (781) 273 2005
Fax (781) 273 2009