Try Jeff Melzak at Case Western University. ([email protected]).
They grow thick poly on 4" wafers.

Jon Bernstein


At 04:34 PM 4/9/99 -0400, you wrote:
>Hi!
>Is there some place where I could get thick polysilicon deposited on
>oxidized Si wafers?  I am looking for ~10um thick layer.
>
>Thanks
>Madan
>
>
>




Jonathan Bernstein
MEMS Technology Center
Draper Labs, MS 37
555 Technology Square
Cambridge, MA 02139 USA

[email protected]
Tel. (617) 258-2513
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