Hi:
    Does anybody have experience to deposit polysilicon on 7740 glass as
etching mask? or just have any experience of sputtering polysilicon?
    I found some papers telling about that, but some require high frequency,
can we just do it in common machine by just changing current or pressure?
____________________________________________
Jerry Lee
(Jia-Hong Lee)

Insitute of Applied Mechanics,
National Taiwan University
Taipei, Taiwan, ROC

e-mail:
[email protected]
[email protected]

"Try then error is better than no try"