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MEMSnet Home: MEMS-Talk: effect of boron on stress in nitride?
effect of boron on stress in nitride?
1995-06-22
Albert K. Henning
effect of boron on stress in nitride?
Albert K. Henning
1995-06-22
Does anyone have experience with the effect of boron diffusion on stress in
nitride thin films (500 - 2500 A)?

Thanks,

Al Henning
al.henning@dartmouth.edu


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