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MEMSnet Home: MEMS-Talk: Thermal expansion comparision between bulk and thin film
Thermal expansion comparision between bulk and thin film
1999-04-23
[email protected]
Thermal expansion comparision between bulk and thin film
[email protected]
1999-04-23
To whom it may be concern,

I am interested in micro-actuator using Ni-Ti thin films(SMA, shape memory
alloy).
I have some data about the film in bulk state.
Would you let me know thermal expansion difference between bulk and SMA thin
film (2-micrometers)
including general tendency of thin film metals?

Is there any difference in thermal expansion coefficient between bulk and thin
film?


Waiting for your reply,
Best Regards.


Sung-june PARK

SAMSUNG ELECTRO-MECHANICS CO., LTD.
Suwon-city, KOREA
E-mail: [email protected]
Phone: +82-331-210-6677


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