combdrives

Try this one (theoretical):
P. B. Ljung, "Sequential Solutions of field equations using a single BEM
model"
Sayes on top of my copy: DSC-Vol. 59, Microelectromechanical Systems (MEMS)
ASME 1996
pp: 409-415

Jer-Liang Yeh wrote:

> Dear community members,
>
>         Could anyone tell me which papers describe the nonlinear force
> output of conventional interdigitated electrostatic combdrives when the
> overlapping length of combs is small (eg. less than the gap)?  Any
> theoretical or experimental work is appreciated.
>
> later,
> Andrew Yeh
>
> Cornell University
>
>

--
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Alexander Hoelke, Postdoctoral Associate
 Massachusetts Institute of Technology
 Microsystems Technology Laboratory
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