>
> Does anybody has any information on a
> software that simulates KOH/EDP etch of
> silicon..(basically to get information
> on issues like corner compensation,
> under-cut).
>
> Thanks,
>
> Kavita Chandra
>
>

I list 2 free packages at

http://mitghmr.spd.louisville.edu/mems_links.html

Kevin W.
--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]