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MEMSnet Home: MEMS-Talk: Re: photoresist spinner
Re: photoresist spinner
1999-04-15
Kevin M Walsh
1999-04-15
jneogi
1999-04-15
Klaus Ruhmer at Home
1999-04-15
Jim Beall
1999-04-15
[email protected]
1999-04-16
Shile
Re: photoresist spinner
Kevin M Walsh
1999-04-15
> Our photoresist spinner died last week and we are looking for a new one.
> I found several manufacturers of small benchtop spinners - Headway,
> Laurell, Cost Effective Equipment (part of Brewer Science) and SCS
> (Specialty Coating System). Does anyone have experience, good or bad,
> with these spinners? Are there others that I should be looking into?
>
> Winston
>
> --
> Winston Chan                          | phone: (319) 353-2398
> Dept. of Electrical Engineering       | fax: (319) 353-1115
> University of Iowa                    | email: [email protected]
> Iowa City, IA 52242
>
>

Winston,

We have a SCS benchtop spinner and it works fine, but ours does not have a
spread and spin feature, only a ramp.

I then bought a floor model Solitec spinner with all the bells and whistles.
It only ran about 10K, not too much more than the benchtop ones.  You may
want to
check into Solitec as long as you are researching it.

A photo of our solitec spinner is at
http://mitghmr.spd.louisville.edu/equipment/spinner.html

Good Luck,
Kevin W.

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]


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