Hi,
I remenber that there is a paper about the simulation in actuator and
sensor. You can check it
-----Original Message-----
From: Kavita Chandra [mailto:[email protected]]
Sent: Thursday, April 15, 1999 1:44 AM
To: [email protected]
Subject: Simulation of KOH etch
Does anybody has any information on a
software that simulates KOH/EDP etch of
silicon..(basically to get information
on issues like corner compensation,
under-cut).
Thanks,
Kavita Chandra
