> Does anybody has any information on a software that simulates KOH/EDP etch of
> silicon..(basically to get information on issues like corner compensation,
> under-cut).>
> Thanks, Kavita Chandra
Hi,
I can recommend you our simulation tool SIMODE/QSIMODE to simulate
the KOH/EDP etching. There are standard etch rates for KOH and EDP
available (EDP only on request). For a mixture of both, it is possible
to produce a special etch rate file for your etch conditions.
For more information please see
http://www.gemac-chemnitz.de/mst/mst_eng.htm
With kind regards
Dirk Zielke
Dirk Zielke
GEMAC mbH
Matthesstrasse 53
09113 Chemnitz
Germany
Tel.: +49 371 3377 131
Fax.: +49 371 3377 272
email: [email protected]
http://www.gemac-chemnitz.de (Deutsch)
http://www.gemac-chemnitz.de/mst/mst_eng.htm (English)
