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MEMSnet Home: MEMS-Talk: Re: Simulation of KOH etch
Re: Simulation of KOH etch
1999-04-15
Kevin M Walsh
1999-04-15
jneogi
1999-04-15
Andreas Ehrlich
1999-04-15
Dirk Zielke
1999-04-15
Michel Rosa
1999-04-15
Phil Rayner
1999-04-19
Andrezej Prochaska
1999-04-29
Uwe Breng
Re: Simulation of KOH etch
Michel Rosa
1999-04-15
Hi -

There is one called ACES (Anisotropic Crystalline Etch Simulator....I think).
You can get beta copies off the web just  do a search for Aces...

Mike Rosa.

At 10:44 AM 4/14/99 PDT, you wrote:
>
>Does anybody has any information on a
>software that simulates KOH/EDP etch of
>silicon..(basically to get information
>on issues like corner compensation,
>under-cut).
>
>Thanks,
>
>Kavita Chandra
>
>
>

Electronic Materials Laboratory.

Xerox PARC
3333 Coyote Hill Rd,
Palo Alto. USA. 94304.

Ph  : (650) 812-4162.
Fax : (650) 812-4140.


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