Dung-An,
The density of Si is 2.33g/cm3.  The density of poly-Si would depend on
your process conditions (which in turn influence the dep rate).  I do not
have these correlations.  Depending on your application, you might be able
to approximate it to the density of Si.

Hope this helps.
Goodluck.
Jaideep


At 08:20 PM 4/19/99 -0400, you wrote:
>Dear MEMS people
>Could you tell me what the density of LPCVD polysilicon is ?
>I much appreciate that.
>Have a good day.
>
>
>
>   Sincerely,
>          Dung-An
>
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