There is a paper in the 1998 ASME IMECE proceedings of the MEMS
symposium. It is page 487 of the proceedings.

The first author is Veljko Milanovic from George Washington University.

Abe Lee

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Abraham P. Lee, Ph.D.
Microstructures Group Leader
Center for Microtechnology
Lawrence Livermore National Lab
7000 East Ave., M/S L-223
Livermore, CA 94550

Phone: (925) 423-4524
Fax:   (925) 422-2783
email: [email protected]