Perhaps you could use an optically levered laser beam.  I have used a very
crude setup of this sort to directly measure curvature of film coated
substrates to determine the film stress.  A more refined version of the
optically levered laser is comonly used to measure deflection of AFM
cantilivers
-----Original Message-----
From: Junhua Wu 
To: MEMS@ISI.EDU 
Date: Wednesday, April 21, 1999 10:24 AM
Subject: deflecetion measurement of bimetallic cantilever beams


>
>Hi:
>We are using a laser optical system to measure the deflection of the
>bimetallic cantilever beams. We are not using the interferometer  method.
>Our output signal is a voltage from the PSD(Position Sensitive Dectector),
>and we would like to know how much does the cantilever beam deflect.
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>Does anyone have such experience to calibrate this kind of measurement?
>I would appreciate any suggestions.
>
>OR some advice on how to measure the deflection of the bimetallic
>cantilever beam(say, a 100um X 50um cantilever).
>
>Thanks,
>Junhua Wu
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