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Use differential capacitive sensing...(like a differential amplifier).

At 01:31 PM 11/18/98 -0600, you wrote:
>Dear Colleague:
>
>       Capacitor in MEMS is usually very small (~ fF).
>       How can I measure the capacitance of this kind of capacitor at the
>        presence of large parasitic capacitor and resistor?
>
>---
>Chieh-Hsiao Wang
>[email protected]
>Department of ECpE
>Iowa State University
>
>
_______________________________________
Vishal Gupta
Grad Student @ECE, Carnegie Mellon
Off :   412-268-3333    412-268-5103
Resi :  412-361-3389
________________________________________
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Use differential capacitive sensing...(like a differential
amplifier).


At 01:31 PM 11/18/98 -0600, you wrote:
>Dear Colleague:
>       
>       Capacitor
in MEMS is usually very small (~ fF).
>       How can
I measure the capacitance of this kind of capacitor at the 
>        presence of large
parasitic capacitor and resistor?
>
>---
>Chieh-Hsiao Wang
>[email protected]
>Department of ECpE
>Iowa State University
> 
>



_______________________________________

Vishal Gupta

Grad Student @ECE, Carnegie Mellon

Off :   412-268-3333
   412-268-5103

Resi :  412-361-3389

________________________________________ 

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