Try MCNC.  I know they do 4" wafers, but don't know about 5".
I think Lawrence Berkeley Lab or Lawrence Livermore has the 5" backside
capability also.
    Good Luck
     Jon Bernstein

At 03:22 PM 11/29/98 -0500, you wrote:
>Hi!
>
>We are looking for a way to get back-side alignment done on 5-inch wafers.
>
>Do you know of anyone who will do back-side alignment on 5-inch wafers on a
>job-shop basis?
>
>Alternatively, do you know of anyone who has a mask holder and wafer chuck
>(5-inch wafers) for a Karl Suss MA-6 that they might be willing to loan,
>rent, or sell to us?
>
>
>Perry Skeath
>SprayChip Systems Corp.
>9841 Greenbelt Road, Suite 101
>Seabrook MD 20706-6270
>(301) 552-5570 voice
>(301) 552-5573 fax
>
>
>
>
Jonathan Bernstein
MEMS Technology Center
Draper Labs, MS 37
555 Technology Square
Cambridge, MA 02139 USA

[email protected]
Tel. (617) 258-2513
Fax  (617) 258-4238