May be this paper may be of interest to you:

Author: C. Marxer, M.-A. Gretillat, N.F. de Rooij, O. Anthamatten, R.
Baettig, B. Valk, P. Vogel

Title: "Reliability Considerations for Electrostatic Polysilcion Actuators
Using as an Example the Remo-Component"

Journal / Proceeding: Sensors and Actuators A, Vol. A61, No 3, pp. 449-454,
1997

C. Marxer

Christophe Gorecki wrote:

> Dear MEMS collegues:
> I research the bibliography concerning a general characterisation of
> MEMS reliability (parameters to measure/measuring techniques) based on
> 1. Improving of the design
> 2. Diagnostics during the manufacturing:
> 3. Diagnostics during the use.
> Does anyone know the publications or web adresses to extract these
> informations ?
> Thank you very match;
> Best regards
> C. Gorecki
>
> --
>   *******************************************************************
> Dr. Christophe Gorecki, CNRS Senior Researcher
> Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
> 16 route de Gray, 25030 Besancon, France
> Tel: +33-3-81666594, fax: +33-3-81666423
> e-mail: christophe.gorecki@univ-fcomte.fr
>