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MEMSnet Home: MEMS-Talk: Re: selective etching of Cu (Ag) over alumina
Re: selective etching of Cu (Ag) over alumina
1999-05-05
Zhen YANG
1999-05-05
MicroMech1@aol.com
1999-05-05
BobHendu@aol.com
Re: selective etching of Cu (Ag) over alumina
MicroMech1@aol.com
1999-05-05
Dear Dr. Zangari,

Ferric chloride, FeCl2 will etch copper. I believe it will leave the aluminum
alone, especially with the oxide layer present. You can pick it up at the
local Radio Shack store. It is used for etching PC boards.

Good luck,
Michael Mattes
 MicroMechatronics


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