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MEMSnet Home: MEMS-Talk: TEGAL Asher Manual
TEGAL Asher Manual
1999-05-05
Kevin M Walsh
TEGAL Asher Manual
Kevin M Walsh
1999-05-05
Help!!

I am looking for a copy of an operation/maintenance manual for an old
Tegal Plasma Barrel Asher (Model 400). Can someone please help?

Thanks
Kevin Walsh

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: kmwals01@starbase.spd.louisville.edu


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