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MEMSnet Home: MEMS-Talk: Chrome etch
Chrome etch
1999-05-10
David Menche
Chrome etch
David Menche
1999-05-10
  We are using chrome as a hard mask to dry etch SiO2.
What is a good chrome echant that will not attack the photo resist, nor
SiO2, and what kind of etch rate is expected.   tried potassium
permaginate/potassium hudroxide solution, and find it is very slow at
chrome etch, and fast at dissolving the resist.

thanks    dave menche


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