ARPA MEMS Broad Agency Announcement

BAA #: 94-40
CBD Reference: July 1, 1994
ARPA Office: ESTO
Fax Number: (703) 351-8616 (ATTN: BAA 94-40)
Email Address: BAA94-40@arpa.mil

Title: Microelectromechanical systems (MEMS)

Technical Areas Cited in BAA: MEMS manufacturing technologies; MEM systems
developments and demonstrations; infrastructure activities for MEMS design,
fabrication and characterization; and new application domains.

ABSTRACT Deadline Date: 4:00 pm, EDT, Friday, August 26, 1994
PROPOSAL Deadline Date: 4:00 pm, EDT, Friday, November 18, 1994