A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: Drilling holes in Si
Re: Drilling holes in Si
1998-11-30
John Klemic
1998-11-30
MicroMech1@aol.com
1998-11-30
MicroMech1@aol.com
1998-11-30
TK Wang
Re: Drilling holes in Si
TK Wang
1998-11-30
It has been done.  We did it with an excimer on a
standard pressure sensor diaphram.  We got a hole
about 40um diameter.  It wasn't very clean and round.

Kirthi Roberts wrote:
>
> Dear MEMS enthusiasts,
>
> Has anyone laser drilled holes on a 50-100
> micrometer thick silicon membrane, to get a roughly
> cylindrical cavity. I need holes of diameter of
> about 50 micrometers on a Silicon membrane of the
> above mentioned thickness. If anyone knows of any
> publications in this area or can offer any advice or
> tips, I would much appreciate if you could send them
> to me.
>
> Thanks in advance,
>
> Kirthi Roberts
>
> --
> __________________________________
> Kirthi Roberts
> School of Engineering Science
> Simon Fraser University
> Vancouver,
> Canada
> e-mail : kroberts@sfu.ca
>


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Harrick Plasma, Inc.
The Branford Group
Process Variations in Microsystems Manufacturing