hi there! i encountering the same problem. how do detect such small
capacitance of 1fF?

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> From: Chieh-Hsiao Wang 
> To: [email protected]
> Subject: capacitive sensor measurement
> Date: Thursday, November 19, 1998 3:31 AM
>
> Dear Colleague:
>
>       Capacitor in MEMS is usually very small (~ fF).
>       How can I measure the capacitance of this kind of capacitor at the
>         presence of large parasitic capacitor and resistor?
>
> ---
> Chieh-Hsiao Wang
> [email protected]
> Department of ECpE
> Iowa State University
>