I am wondering if there is a recipe (assuming it's possible) for
bonding together two wafers, one with a Silicon surface, and the
other with a polyimide coating? Can it be done with just heat and
pressure?
Thanks,
John Neumann
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Dr. John Neumann
Postdoctoral Researcher, ECE Dept.
Micro-electro-mechanical Systems (MEMS)
1209 Hamerschlag Hall
Carnegie Mellon University
Pittsburgh, PA 15213-3890
[email protected]
phone: (412) 268-4404
FAX: (412) 268-2860
