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MEMSnet Home: MEMS-Talk: Re: Pt electrode failure after thermal bonding. . . help?
Re: Pt electrode failure after thermal bonding. . . help?
2000-02-08
Kin Yan
Re: Pt electrode failure after thermal bonding. . . help?
Kin Yan
2000-02-08
Dear Drew,

We have done some works on fusion bonding (or thermal bonding) and
patternable adhesion bonding with Pt electrode in between two glass
plates. The process will soon be published in "Biomedical Microdevice."
Based on our fusing bonding process, the Pt surface, which was in between
the glass plates, was not as shiny as the exposed Pt surface but it was
certainly not grey-white. We didn't measure the resistivity of the Pt.
However, we were able to obtain light form Electrochemiluminescence of
Ru(bpy)3 ion using those Pt electrodes.

Based on the available information, the major difference between your
process and ours is the thickness of Pt, which was 5000A in our process.
If increasing Pt thickness is not feasible, you could try adhesion
bonding,  which don't require high temperature process. Hope those
suggestions help!

Best regards,

Kin Yan

Graduate student
MicroInstruments and Systems Laboratory (MISL)
Dept of Elect and Comp Engineering
University of California, Davis

email: [email protected]
http://www.ece.ucdavis.edu/misl/Homepage.htm


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