Hi,
I need the values of the following physical properties of polysilicon
germanium film(Poly SiGe (30% Ge)). The film is one micron thick.:
1. Coefficient of Thermal Expansion
2. Resistivity
3.Thermal conductivity
4. Young's Modulus
5. Poisson's Ratio
6. Dieletric constant
I'll highly appreciate if any one can inform me of the above .
Thanks in advance.
Sazzadur Chowdhury
Electrical and Computer Enginrering
University of Windsor
Windsor, Ontario, Canada
Email: [email protected]
