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MEMSnet Home: MEMS-Talk: Vacuum/Sputtering Info
Vacuum/Sputtering Info
1996-03-25
Wengkuan_Phoon-CWP004@email.mot.com
Vacuum/Sputtering Info
Wengkuan_Phoon-CWP004@email.mot.com
1996-03-25
Hello MEMS,

Can somebody recommend some technical books on the RF Sputtering & vacuum pump
technologies?

Pls contact: CWP004@email.mot.com

Thank you

Best regards,
WK Phoon


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