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MEMSnet Home: MEMS-Talk: 248nm DUV lithography
248nm DUV lithography
2000-02-08
Gokhan Percin
248nm DUV lithography
Gokhan Percin
2000-02-08
Hello all,

I am wondering if there is a foundary or clean-room that can provide 248nm
DUV lithography and CD-SEM. I am planning to run some test patterns by using
DUV 248nm, and obtain some CD-SEM measurement signals.

Thanks,

Gokhan


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