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MEMSnet Home: MEMS-Talk: convex corner compensation
convex corner compensation
2000-02-28
Bharath Seshadri
convex corner compensation
Bharath Seshadri
2000-02-28
hi
i am trying to etch a free standing pyramid of 100x100 microns at the base
and atleast 40 microns tall using KOH/IPA.
does anyone know a corner compensation structure which will result in the
pyramid.
thanks
bharath


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