Dear colleagues,

I am looking for a source that can supply us with LPCVD-nitride
layers (150 - 300 nm) on new or preproccessed 4- and 6-inch Si
wafers at a small but regular basis?
Please let me know if you or your known sources can offer this
passivation layer.
Thanks in advance.

Karl Kuehl


Fraunhofer-Institut fuer Mikroelektronische Schaltungen u.Systeme Muenchen
Karl Kuehl
Dienstleistungszentrum Mikrosystemtechnik Muenchen
Hansastrasse 27 d
D-80686 Muenchen
Germany

Phone:    +49 89 54759 237
Fax:      +49 89 54759 100
email:    [email protected]
Web:      http://www.ift.fhg.de