A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: leakage current of dc sputtered Ta2O5
leakage current of dc sputtered Ta2O5
2000-03-05
jae hong LIM
leakage current of dc sputtered Ta2O5
jae hong LIM
2000-03-05
i use Ta2O5 as hydrogen conductor.
Ta2O5 is reactive dc sputtered.
i change the expermental parameters such as gas pressure and power.
but when i sputtered Pt on Ta2O5, Ta2O5 acts as like resistor not insulator.
i also tried 2 um thick Ta2O5 to enhance its density.
but it doesn't work.
thanks for reading it.
______________________________________________________
Get Your Private, Free Email at http://www.hotmail.com


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
MEMS Technology Review