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MEMSnet Home: MEMS-Talk: Dry isotropic oxide/nitride etch
Dry isotropic oxide/nitride etch
2000-03-06
Chris-Seung Bok Lee
Dry isotropic oxide/nitride etch
Chris-Seung Bok Lee
2000-03-06
Hello,
        I was wondering if anyone is aware of dry isotropic SiO2 etch,
with a high selectivity to silicon?  We are trying to remove a thin
sidewall oxide on a patterned beam.

Thanks for your help,

Chris Lee


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