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MEMSnet Home: MEMS-Talk: Re: Re: Is gold CMOS compatible?
Re: Re: Is gold CMOS compatible?
2000-03-14
Gang Li
Re: Re: Is gold CMOS compatible?
Gang Li
2000-03-14
At 00-3-7 10:12:00, you wrote:
>Hi, Winston,
>
>We are making devices with gold as the electrode. Si is the substrate and Ti
>is the adhesion layer. I am wondering if we need a barrier layer according
>to your message. What's the material for barrier layer if it is necessary?
>
>Yahong
>

Ti/Pt/Au
Ti is adhesion layer
Pt is barrier layer
Au is electrode
others use Cr/Au


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