We are developping a technique to observe micro tubes, micro chambers,
...machined  INSIDE a Silicon wafer to see, just before use, whether they
are "blocked-up" or not, and eventually what is the quality of the inner
surface of such volumes.

 Can any one tell us whether other techniques than our (soft X-rays) can do
it? IR imaging?, ...Are there any commercial apparatus intended to do
(rapidly) quality inspection on such  intra- machined devices?

Dr. Robert BAPTIST
CEA-LETI
DMITEC/SIA/ES
17, Avenue des Martyrs
38054 GRENOBLE Cedex
FRANCE

[email protected]
tel:   00 33 (0) 4 76 88 36 01
Fax: 00 33 (0) 4 76 88 94 56
http://www.cea.fr