Hi all,
I would like to know how to smooth or polish and edge in silicon. It is the
edge of a very deep groove and its angle is about 54.
Thanks in advance,
Sandra

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Sandra Bermejo Broto
Semiconductor Devices Group (GDS)
Electronic Engineering Department
UPC-Campus Nord, C5
Jordi Girona, 1-3
E-08034 Barcelona
SPAIN
Phone: + 34 93 401 74 81
Fax:       + 34 93 401 67 56
e-mail: [email protected]
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