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MEMSnet Home: MEMS-Talk: Double side polished wafer
Double side polished wafer
2000-04-11
Wenk, Beatrice
Double side polished wafer
Wenk, Beatrice
2000-04-11
Due to a misunderstanding with our supplier we have 6" double side
polished wafer on the stock we can not use:

1.
Diameter                (150.0+-0.3) mm
Thickness               (525+-15) µm
conductivity type:      P
dopant                  Boron
Crystal orientation     {100}
Off-orientation         0.0+- 1.0°
Resistivity             5-15 Ohmcm
primary flat            location {110}+-0.2°                    length
(57.50+-2.5)mm
secondary flat          location 90+-5.0° CW from PF            length
(37.50+-2.5)mm
price:                          50$ per wafer

2.
Diameter                (150.0+-0.3) mm
Thickness               675+-15µm
conductivity type:      P
dopant                  Boron
Crystal orientation     {100}
Off-orientation         0.0+- 0.5°
Resistivity             5-15 Ohmcm
primary flat            location {110}+-0.2°                    length
(57.50+-2.5)mm
secondary flat          location 90+-5.0° CW from PF            length
(37.50+-2.5)mm
price:                          50$ per wafer
For further information please contact:

Beatrice Wenk
Fraunhofer Institut für Siliziumtechnologie (ISIT)
Fraunhoferstr.1
D-25524 Itzehoe

phone: +49-(0)-4821-17 4508
fax: +49-(0)-4821-17 4251
e-mail: [email protected]
homepage: http://www.isit.fhg.de


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