Hello Sandra,

My name is Mario Robles and we sell dicing blades. One way would be to make this
groove is with a fine diamond dicing blade.  How do you currently make this
groove in the silicon and how deep is it?  Also how smooth of a finish is
needed. We can make the tip of the blade with an angle to form the angle you
spoke about.  If you could send us a drawing or more information I could tell
you if it would be possible to do this with a dicing blade.

Mario Robles
Tanaka Systems Inc.
2577 Leghorn Street
Mountain View, CA 94043
650-966-8001 phone
650-966-1881 fax


-----Original Message-----
From:   Sandra Bermejo [SMTP:sandra@eel.upc.es]
Sent:   Thursday, April 06, 2000 6:34 AM
To:     MEMS@ISI.EDU
Subject:        Smooth an edge

Hi all,
I would like to know how to smooth or polish and edge in silicon. It is the
edge of a very deep groove and its angle is about 54.
Thanks in advance,
Sandra

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Sandra Bermejo Broto
Semiconductor Devices Group (GDS)
Electronic Engineering Department
UPC-Campus Nord, C5
Jordi Girona, 1-3
E-08034 Barcelona
SPAIN
Phone: + 34 93 401 74 81
Fax:       + 34 93 401 67 56
e-mail: sandra@eel.upc.es
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